Prominent - Processes for MEMS by Inkjet Enhanced Technologies

During the first 18M period most of the project targets have been achieved and both conventional ink-jet system as well as superfine inkjet system enabling micrometer scale structures have been used in development work. Surface activation for inkjet process has been successfully demonstrated and Innophysics has introduced a new product, μPlasmaPrint system to commercial markets. In 3D integration activities process steps have been developed for first MEMS prototypes successfully and work continues with new devices.

For more information, please have a look on the website.


Prominent: Conferences and publications

In Autumn 2014, Prominent has been present at several conferences:

• 5th Electronics System-Integration Technology Conference (ESTC 2014), Helsinki, Finland on September 16-18, 2014: Presentation.

• 11th International Wafer-Level Packaging Conference (IWLPC), San Jose, CA on November 11-13, 2014: Abstract of the Presentation.

• European Nanoelectronics Forum 2014, Cannes, France on November 26-27, 2014: Poster.

In addition, the following publication was produced:

• “3D MEMS Wafer Level Packaging Exemplified by RF Characterized TSVs & TGVs and Integration of Bonding Processes”, in proceedings of Int. Wafer-Level Packaging Conference (IWLPC), November 11-13, 2014, San Jose, CA, USA; P. Ågren, T. Ebefors, J. Liljeholm, N. Svedin, Z. Baghchehsaraei, P de Veen

Information about all the conferences and other publicity is available on the Prominent website.


Season's Greetings,


Wishing you a Successful New Year 2015,
Prominent partners